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Jun. 2021
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Xu Yang, Ming Zhang, Rong Cheng, Yu Zhu, Leijie Wang. Wafer Stage Modal Model Identification by Modified Vector Fitting Method[J]. JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY, 2021, 30(zk): 187-195. doi: 10.15918/j.jbit1004-0579.20052
Citation: Xu Yang, Ming Zhang, Rong Cheng, Yu Zhu, Leijie Wang. Wafer Stage Modal Model Identification by Modified Vector Fitting Method[J].JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY, 2021, 30(zk): 187-195.doi:10.15918/j.jbit1004-0579.20052
shu

Wafer Stage Modal Model Identification by Modified Vector Fitting Method

doi:10.15918/j.jbit1004-0579.20052
  • 1.

    State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China

  • 2.

    Beijing Key Laboratory of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing 100084, China

Funds:the National Natural Science Foundation of China(51677104)
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  • Corresponding author:assistant professor, Ph.D. E-mail:chengr@tsinghua.edu.cn
  • Received Date:2020-05-29
  • Publish Date:2021-06-30
    Abstract
  • Vector fitting is modified in this study for the parametric identification of a model with an undamped rigid body mode in the frequency domain. The modal model of a six-degree-of-freedom (6DOF) wafer stage is identified using the modified vector fitting method. The modal model is typically fitted from the matrix fraction description (MFD) form of the transfer function, which increases the cost function. The vector fitting in frequency domain provides an approach to fitting the modal model directly from frequency response functions(FRFs) via a partial rational basis function, the poles of which can be obtained by pole relocation technology. The traditional vector fitting method is not applicable in identifying systems containing rigid body modes. The method is reformulated here and effectively applied for wafer stage identification. The accuracy of the fitted model is validated by control loop simulation.
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