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Article Navigation> JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY> 2015> 24(4): 466-470
DENG Yong-jun, ZHANG Zhi-jing, JIN Xin, XU Zhi-yao, SUN Hong-chang. High-precision method of detecting motion straightness based on plane mirror interference[J]. JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY, 2015, 24(4): 466-470. doi: 10.15918/j.jbit1004-0579.201524.0406
Citation: DENG Yong-jun, ZHANG Zhi-jing, JIN Xin, XU Zhi-yao, SUN Hong-chang. High-precision method of detecting motion straightness based on plane mirror interference[J].JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY, 2015, 24(4): 466-470.doi:10.15918/j.jbit1004-0579.201524.0406
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High-precision method of detecting motion straightness based on plane mirror interference

doi:10.15918/j.jbit1004-0579.201524.0406

  • School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China

  • Received Date:2014-02-12
    Abstract
  • A high-precision method of detecting motion straightness was proposed based on the principle of plane mirror interference after analyzing the motion straightness error of a linear stage. Detection experiments were carried out and the motion straightness errors were separated by the linear regression method. Finally, linear measurement uncertainty of the detection method was estimated. The results showed that this detection method was simple and accurate, and was especially suitable for precision detection of motion straightness error in the small travel movement of ultra-precision machining.
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