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LI Ming-hui, GAO Shi-qiao, LIU Hai-peng, LIANG Xin-jian. Computation of Capacitance for MEMS Comb-Drive Structures[J]. JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY, 2009, 18(1): 1-5.
Citation: LI Ming-hui, GAO Shi-qiao, LIU Hai-peng, LIANG Xin-jian. Computation of Capacitance for MEMS Comb-Drive Structures[J].JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY, 2009, 18(1): 1-5.
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Computation of Capacitance for MEMS Comb-Drive Structures

  • School of Aerospace Science and Engineering, Beijing Institute of Technology, Beijing 100081, China

  • Received Date:2007-07-27
    Abstract
  • According to the characteristics of comb-drive structures, the electrical potential field is analyzed; the model based on corner capacitor is presented and solved with the capacitance characteristic formula of nonlinear capacitor. Compared with the results of finite element method simulation, the model based on corner capacitor is more accurate than the models based on infinite parallel plate capacitor and parallel plate capacitor with edge effects.
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    • References (5)
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    Tang W C, Nguyen T H, Howe R T. Laterally driven polysilicon resonant structures //Proc IEEE Micro Electro Mechanical Systems. New York, USA: , 1989: 53-59.
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    Li Yong, Li Yuhe, Li Qingxiang, et al. Computation of electrostatic forces with edge effects for non-parallel comb-actuators[J]. J of Tsinghua Univ (Sci &Tech), 2003, 43(8): 1024-1026, 1030. (in Chinese)
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