Citation: | WANG Wei-ming, SHAN Ming-cai, MA Shu-yuan, TANG Shui-yuan. Control of magnetic levitation positioning stage with an eddy current damper[J].JOURNAL OF BEIJING INSTITUTE OF TECHNOLOGY, 2012, 21(3): 315-320. |
[1] |
Kim W J. High-precision planar magnetic levitation. Boston, USA: Massachusetts Institute of Technology, 1997.
|
[2] |
Kim W J, Trumper D L. High-precision magnetic levitation stage for photolithography[J]. Precision Engineering, 1998, 22(3): 66-77.
|
[3] |
Gao Wei, Dejima S, Yanai H, et al. A surface motor-driven planar motion stage integrated with an
XYθ
Zsurface encoder for precision positioning[J]. Precision Engineering, 1998, 28(3): 329-337.
|
[4] |
Jeon J W, Caraiani M, Hwang D H, et al. High-precision positioning control of magnetic levitation system[C]//32nd Annual Conference on IEEE Industrial Electronics. Piscataway, NJ, USA: IEEE, 2006: 5221-5226.
|
[5] |
Huang S J, Wang S S. Mechatronics and control of a long-range nanometer positioning servomechanism[J]. Mechatronics, 2009, 19: 14-28.
|
[6] |
Zhang Yi, Ma Shuyuan, Zhang Lei. Magnetic field analysis and optimization design of magnetic stage[J]. Nanotechnology and Precision Engineering, 2010, 8(3): 221-225.
|
[7] |
Wang Weiming, Ma Shuyuan, Wang Wenqiang, et al. Nonlinear control of maglev positioning stage[C]//Sixth International Symposium on Precision Engineering Measurements and Instrumentation.: SPIE, 2010, 7544: 75441H-1-75441H-8.
|
[8] |
Hu Yueming. Nonlinear control systems theory and applications[M].Beijing: National Defence Industrial Press, 2001. (in Chinese)
|
[9] |
Lu Qiang, Mei Shengwei, Sun Yuanzhang. Nonlinear control power systems (2ndEdition)[M]. Beijing: Tsinghua University Press, 2008. (in Chinese)
|
[10] |
Isidori A. Nonlinear control systems[M]. 3rd ed. London: Springer-Verlag London Limited, 1995.
|